Overhead Hoist Transport (OHT)

Name: Overhead Hoist Transport (OHT)
Brand: MFSG

FOUP/FOSB Frame FOUP SMIF Pod Reticle SMIF Pod

Automated Overhead Hoist Transport (OHT) designed to move FOUPs and other wafer carriers between stockers, OHBs and load ports, enabling fast, reliable, and contamination-controlled material handling across semiconductor fabs. Featuring intelligent hardware, an AI-Powered OHT Controller, and predictive maintenance capabilities for optimized transport performance and enhanced system reliability.

Key Features

Higher Throughput： ADT < 110 s

Faster Transport： Straight-line speed: 5.5 m/s、Turnout speed: 3.5 m/s without deceleration

Smoother Handling： Vibration < 0.35 G

Slimmer Design： System height: 895 mm

Easier Operation： Intelligent teaching completed in under 2 minutes

Higher Reliability： Hot-standby architecture enables zero-downtime operation

Smarter Scheduling： AI algorithms improve efficiency by up to 30% and support global dynamic dispatching

AI-Powered Overhead Hoist Transport Controller (OHTC)

Intelligent control platform powered by advanced AI algorithms to optimize OHT traffic, routing, and vehicle allocation. By dynamically adapting to real-time fab conditions, it helps reduce average delivery time, minimize congestion, and improve overall transport efficiency and system performance.