Operator Load Unload Station (OLUS)

Name: Operator Load Unload Station (OLUS)
Brand: MFSG

FOUP Frame FOUP SMIF Pod Reticle SMIF Pod (RSP150) Cassette Magazine HA200 Box

The Operator Load Unload Station (OLUS) is designed for the loading and unloading of different carriers in semiconductor manufacturing facilities, supporting both OHT and AMR material handling operations via E84 communication. The latest OLUS features automatic INPUT/OUTPUT port switching, a safety light curtain for enhanced operator protection, and flexible port configurations to meet different operational requirements. An integrated FOUP locking mechanism helps prevent accidental or improper handling by operators. The OLUS can also be configured with an optional purging function to help maintain the required environment within the FOUP or SMIF Pod, while its AMR integration capability enables seamless automated material transfer within the cleanroom.

Optional Configurations

Single-port, two-port or four-port configuration

N₂ or xCDA purging

Key Features

Cleanliness： Class 100

Certifications： CE, SEMI S2

Real-time port status detection： Monitor operational status, sensor status, etc

E84 Compliance： Supporting with OHT or AMR for carrier load/unload

Purge function： Purges the FOUP/SMIF Pod based on actual process requirements

Compatible with multiple interfaces： MCS, EAP

Optional integrated clamp： Clamp/Unclamp the port when a carrier is present

Port status switching： Switches between load/unload modes as required

Light curtain： Interlocked with E84 signal handshaking; triggers an alarm and stops operation when activated

OLUS Management Software

OLUS Software provides real-time visibility into the operating status of each port, including operating mode, process status, sensor status, external I/O signals and FOUP information.