Over Head Buffer (OHB)

Name: Over Head Buffer (OHB)
Brand: MFSG

FOUP Frame FOUP SMIF Pod Reticle SMIF Pod (RSP150) HA200 Box Cassette Magazine

The Over Head Buffer (OHB) integrates with the OHT rail system to provide high-density overhead storage for different carriers. It improves cleanroom space utilization and increases transfer efficiency between process areas. With integrated purge piping and purification units, the system supplies clean gas to maintain a controlled internal environment, helping protect wafer or reticle quality and improve yield.

Optional Configurations

1, 2, 3 or 4 storage positions

Purging functions

Key Features

Modular rack configuration： 1, 2, 4 ports

Integrated control for the entire bay： Via OHTC software control

Independent control of individual shelves： Via OHTC software control

Supports different carrier types： FOUP, Frame FOUP, SMIF Pod, RSP150, Magazine, Cassette, HA200 Box

Purge function： Standard features include flow meter, pressure gauge, and position sensor. Optional features include RFID reader, E84 communication, MFC (Mass Flow Controller), temperature and humidity sensors, and recipe management

OHB（P) Control Software

OHBP Software manages purge operations across all ports within a bay, supporting both continuous and presence-triggered purge modes. With optional RFID and temperature/humidity sensors, it tracks FOUP placement events and environmental changes throughout the purge process, while providing real-time alarms for RFID errors or out-of-range conditions.

Through the web-based UI, users can adjust proportional valves, control gas flow in real time, configure monitoring thresholds for temperature, humidity, flow and pressure, and manually operate solenoid valves.