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RFID Reader RFID Reader

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Next-Generation AMHS
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RFID Reader

RFID is a contactless identification technology that uses radio-frequency signals to identify and exchange data with tagged objects. In semiconductor manufacturing, RFID is widely used in AMHS to identify and track wafer carriers such as FOUPs/FOSBs, HA200 boxes, SMIF Pods, etc. RFID tags store information such as carrier ID and lot information, while readers installed at OHT, stockers, load ports, and other material handling stations automatically read the data. RFID solutions commonly use HF (High Frequency) and LF (Low Frequency) technologies, depending on the application and required reading distance. By providing reliable carrier identification and tracking, RFID helps improve material traceability, automation, and production efficiency.

Key Features

CE Certified

Compliant with SEMI Standards

Contactless identification using RF communication

HF and LF frequency options for different applications

Read/write capability for carrier data

Fast and reliable carrier identification

Easy integration with AMHS, MCS and MES

Designed for semiconductor cleanroom environments

Applications

Low Frequency type: 134.2KHz RFID

High Frequency type: 13.56MHz RFID

RFID Tag Carrier Compatibility: FOUP, FOSB, SMIF Pod, HA200 box, Metal cassette, Magazine, Tray

RFID Reader Application: All AMHS products, Equipment loadport

MFSG RFID Reader Controller

The MFSG RFID Reader Controller provides centralized configuration, monitoring, and management of RFID readers for semiconductor AMHS applications.

It includes two dedicated software tools:

1. Setup & Configuration Software: Used for initial system setup, including IP configuration, reader parameters, and communication settings.

2. Monitoring GUI: Provides real-time monitoring of individual RFID reader performance and displays live RFID tag IDs for easy system status verification and troubleshooting.

The controller supports reliable RFID communication and carrier identification, enabling efficient monitoring and management of RFID readers across semiconductor material handling systems.

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