RFID Reader
RFID is a contactless identification technology that uses radio-frequency signals to identify and exchange data with tagged objects. In semiconductor manufacturing, RFID is widely used in AMHS to identify and track wafer carriers such as FOUPs/FOSBs, HA200 boxes, SMIF Pods, etc. RFID tags store information such as carrier ID and lot information, while readers installed at OHT, stockers, load ports, and other material handling stations automatically read the data. RFID solutions commonly use HF (High Frequency) and LF (Low Frequency) technologies, depending on the application and required reading distance. By providing reliable carrier identification and tracking, RFID helps improve material traceability, automation, and production efficiency.
CE Certified
Compliant with SEMI Standards
Contactless identification using RF communication
HF and LF frequency options for different applications
Read/write capability for carrier data
Fast and reliable carrier identification
Easy integration with AMHS, MCS and MES
Designed for semiconductor cleanroom environments
Low Frequency type: 134.2KHz RFID
High Frequency type: 13.56MHz RFID
RFID Tag Carrier Compatibility: FOUP, FOSB, SMIF Pod, HA200 box, Metal cassette, Magazine, Tray
RFID Reader Application: All AMHS products, Equipment loadport