TRANSPORT SYSTEM

Overhead Hoist Transport (OHT) Autonomous Mobile Robot (AMR) Conveyor System

STORAGE SYSTEM

Tower Stocker Stocker Reticle Pod Stocker Near Tool Buffer (NTB) Purge Reticle Cabinet (RC) E‑Rack Operator Load Unload Station (OLUS) Over Head Buffer (OHB)

PURGE SYSTEM

Overhead Purge System (OPS) Tool Loadport Purge (TLP) Front Purge System (FPS)

SOFTWARE SYSTEM

Material Control System (MCS) AMHS Monitoring & Simulation (AMS) FAB Monitoring & Simulation (FMS)

AMHS ACCESSORIES

E84 sensor RFID Reader Smart Tag Reader

E‑Rack

FOUP SMIF Pod Reticle SMIF Pod HA200 box Magazine Cassette

E-Rack is a high-density storage solution for semiconductor carriers, featuring manual loading and retrieval with integrated HF or LF RFID tracking for carrier identification and location tracking. It can also be integrated with AMR operations through various interfaces, including Web Services, REST APIs, and message middleware, enabling seamless material handling and inventory coordination within the cleanroom.

Key Features

SUS304 material

Low footprint storage for different carriers

Compatible with AMR operation

Equipped with LF or HF RFID readers to monitor the location of carriers in real time

Compatible with Multiple EAP Communication Protocols

Able to customise to customer specs

Support Class 100 environment

E-Rack Management System

E-Rack Management Software

E-Rack Software supports multiple tag types, providing accurate and stable identification for reliable carrier tracking and management.

E‑Rack

E‑Rack

Key Features

Supports multiple communication protocols for seamless integration with host systems

Provides access to material transfer history and traceability records

Matching hardware

Stocker

FOUP/FOSB FRAME FOUP SMIF Pod Reticle SMIF Pod Magazine Metal Cassettes

Tower Stocker

FOUP POD Reticle

Reticle Pod Stocker

Reticle Pod Stocker

Reticle SMIF Pod (RSP150) Crystal Box

Talk to Our Experts

Talk to Our Experts

Talk to Our Experts

Smarter Material Flow.
Better Fab Performance.