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TRANSPORT SYSTEM
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Overhead Hoist Transport (OHT) Autonomous Mobile Robot (AMR) Conveyor System
STORAGE SYSTEM
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Tower Stocker Stocker Reticle Pod Stocker Near Tool Buffer (NTB) Purge Reticle Cabinet (RC) E‑Rack Operator Load Unload Station (OLUS) Over Head Buffer (OHB)
PURGE SYSTEM
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Overhead Purge System (OPS) Tool Loadport Purge (TLP) Front Purge System (FPS)
SOFTWARE SYSTEM
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Material Control System (MCS) AMHS Monitoring & Simulation (AMS) FAB Monitoring & Simulation (FMS)
AMHS ACCESSORIES
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E84 sensor RFID Reader Smart Tag Reader

Fire Door

Installed between adjacent fab bays and at the connection points between fab areas and corridors, the Fire-Rated Door integrates with the fire alarm and OHT systems. Once a fire is confirmed, the fire alarm system sends a signal to the OHT system, triggering the door to close and effectively contain the spread of fire within the fab.

Key Features

3-Hour Fire-Resistance Rating

UL Fire Safety Certified

Fire Door
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