Stocker

Name: Stocker
Brand: MFSG

FOUP/FOSB FRAME FOUP SMIF Pod Reticle SMIF Pod Magazine Metal Cassettes

The Stocker is designed for the transport and storage of wafer carriers between production processes in semiconductor cleanrooms. It supports multiple carrier types, including SMIF Pods and FOUPs, and can be equipped with an integrated purge function. With a travel speed of up to 2 m/s, the MFSG Stocker delivers high-performance material handling and is engineered to meet leading industry standards.

Optional Configurations

Manual Port and OHT Port

Sorter Port

N₂ or xCDA Purge Function

Wireless Power Supply

ECO mode

Key Features

Cleanliness： Class 100

Vibration： ≤0.5 G

Max payload： ≤15 kg

Certifications： CE, SEMI S2, S23, F47 Standards

RFID system： Auto tracking by HF or LF device

Auto Teaching： Fast and convenient

Integrated Purge System： N₂ or xCDA

Flexible Port Configuration： Easy swap between In and Out ports

System integration compatibility： With Various MCS

Smart Storage Controller

The Intelligent Stocker Control System provides automated control and inventory management for stocker equipment. Compliant with the SEMI E88 standard, it receives commands from host systems such as the MCS to manage carrier storage and retrieval operations.

When integrated with a 3D camera, the system supports rapid Auto Teaching, simplifying stocker equipment installation and commissioning. It also supports RFID and SmartTag identification. Combined with MFSG’s proprietary RFID, SmartTag and E84 modules, the system delivers industry-leading identification reliability.

Application

Stocker control and inventory tracking

Key Features

Uses intelligent algorithms to optimize command execution and storage-location management, reducing carrier storage and retrieval time while increasing throughput and storage utilization

Interfaces with multiple mainstream MCS platforms for efficient system integration and deployment

Supports real-time monitoring of multiple gas flow, pressure and humidity channels

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