CN
Designed for short and medium distance transportation, the system transfers different types of carriers, like FOUPs, SMIF Pods, HA200 boxes between production areas. It connects different equipment according to the manufacturing process flow while providing temporary buffering capacity for a defined number of carriers.
Faster Transport： Up to 1m/s
Smoother Handling： Vibration < 0.5 G
Intelligent control system for automated routing, traffic management, and seamless material flow, ensuring reliable and efficient conveyor operation across the fab.
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