Near Tool Buffer (NTB)

Name: Near Tool Buffer (NTB)
Brand: MFSG

FOUP SMIF Pod

The Near Tool Buffer is designed to provide temporary carrier storage between the OHT system and equipment load ports. By reducing equipment waiting time, it helps improve tool utilization and overall production efficiency. MFSG's NTB is designed in accordance with SEMI E15.1 and integrates seamlessly with E15.1-compliant load ports.

Optional Configurations

2, 3 or 4 ports

Key Features

Quick assembly/detached method： <30mins

Cleanliness： Class 100

Certifications： CE, SEMI S2 and F47 certified

Buffer capacity： Customizable

User-friendly HMI： Status display, Parameter configuration, Carrier management, Exception management, Log management

Integration compatibility： Compatible with EAP and MCS communication

NTB Control Softtware

The NTB Monitoring and Control Software provides intelligent, efficient and stable management of cleanroom buffer equipment. Using the HSMS protocol, it receives transfer commands from host systems such as the MCS or EAP to manage FOUP storage and retrieval. Through E84 communication, it interfaces seamlessly with standard load ports and sorting equipment.

The NTB server receives tasks created by the host MCS or manually by NTB users, forwards commands to the PLC and monitors execution feedback in real time. Equipment status, task progress and alarm information are reported to the host system, enabling automated storage and retrieval control with continuous equipment monitoring.

Key Features

Extends process-equipment load ports and enables rapid integration with standard equipment, including tools that cannot interface directly with the OHT system

Uses intelligent algorithms to optimize command execution and storage-location management, reducing FOUP storage and retrieval time

Increases transfer throughput and buffer utilization, helping improve fab productivity and manufacturing output

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