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Tower Stocker Tower Stocker

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Next-Generation AMHS
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Software & Hardware
TRANSPORT SYSTEM
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Overhead Hoist Transport (OHT) Autonomous Mobile Robot (AMR) Conveyor System
STORAGE SYSTEM
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Tower Stocker Stocker Reticle Pod Stocker Near Tool Buffer (NTB) Purge Reticle Cabinet (RC) E‑Rack Operator Load Unload Station (OLUS) Over Head Buffer (OHB)
PURGE SYSTEM
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Overhead Purge System (OPS) Tool Loadport Purge (TLP) Front Purge System (FPS)
SOFTWARE SYSTEM
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Material Control System (MCS) AMHS Monitoring & Simulation (AMS) FAB Monitoring & Simulation (FMS)
AMHS ACCESSORIES
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E84 sensor RFID Reader Smart Tag Reader

Tower Stocker

FOUP POD Reticle

The Tower Stocker is designed for cross-floor storage and transport of materials within semiconductor cleanrooms. Developed by MFSG, the system uses a high-speed vertical transfer mechanism to move and store carriers between floors. With a lifting speed of up to 3.5 m/s, it enables efficient and clean material transfer across different production levels.

Optional Configurations

Number of Manual Ports

Number of OHT Ports

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Matching hardware
OHT System
OHT System
FOUP/FOSB Frame FOUP SMIF Pod Reticle SMIF Pod
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Stocker
Stocker
FOUP/FOSB FRAME FOUP SMIF Pod Reticle SMIF Pod Magazine Metal Cassettes
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Conveyor System
Conveyor System
FOUP SMIF Pod HA200 box
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Smarter Material Flow.
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