Overhead Purge System (OPS)

Name: Overhead Purge System (OPS)
Brand: MFSG

FOUP

Overhead Purge System (OPS) is designed to provide controlled N₂ or XCDA purging for FOUPs during overhead material transport and storage. It helps maintain a controlled atmosphere within the FOUP, reducing exposure to contaminants and moisture while supporting wafer protection throughout the AMHS process.

Key Features

Idle Purge mode

Power-Out Purge Continuity

Unified control for the entire bay

Patented Purge Nozzle for particle prevention

Compatible with variable FOUP models in the market

Real time monitoring of Flow Rate/Humidity/O2/Purge time

Integration experience with all major AMHS/Stocker system

Variable flow control, flow rate and purge time can be configured as PPID control by Host command

OPS Controller

OPS Software manages purge operations across all ports within bays, supporting both continuous and presence-triggered purge modes. With optional RFID and temperature/humidity sensors, it tracks FOUP placement events and environmental changes throughout the purge process, while providing real-time alarms for RFID errors or out-of-range conditions. Through the web-based UI, users can adjust proportional valves, control gas flow in real time, configure monitoring thresholds for temperature, humidity, flow and pressure, and manually operate solenoid valves.

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