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Next-Generation AMHS
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Software & Hardware
TRANSPORT SYSTEM
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Overhead Hoist Transport (OHT) Autonomous Mobile Robot (AMR) Conveyor System
STORAGE SYSTEM
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Tower Stocker Stocker Reticle Pod Stocker Near Tool Buffer (NTB) Purge Reticle Cabinet (RC) E‑Rack Operator Load Unload Station (OLUS) Over Head Buffer (OHB)
PURGE SYSTEM
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Overhead Purge System (OPS) Tool Loadport Purge (TLP) Front Purge System (FPS)
SOFTWARE SYSTEM
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Material Control System (MCS) AMHS Monitoring & Simulation (AMS) FAB Monitoring & Simulation (FMS)
AMHS ACCESSORIES
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E84 sensor RFID Reader Smart Tag Reader
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