Purge Reticle Cabinet (RC)

Name: Purge Reticle Cabinet (RC)
Brand: MFSG

Reticle SMIF Pod (RSP150)

The Reticle Pod Cabinet is a purging storage system designed for batch storage of reticle pods used in semiconductor manufacturing. By continuously supplying high-purity gas, it helps maintain a controlled storage environment and protect reticle quality. Developed in-house by MFSG, the Reticle Cabinet can reduce the internal humidity of reticle pods to below 10% RH within a short period of time, even at an extremely low gas flow rate.

Key Features

RFID reader

ESD compliant

Stable System Integration

High-Speed Continuous Purging

High-Capacity Storage with Drawer-Type Design

Compatible with Multiple EAP Communication Protocols

Reticle Cabinet Management Software

The Reticle Cabinet Software provides real-time visibility into storage-slot status, reticle pod information, purge duration and purge stages. It also monitors gas flow and generates alarms when abnormal conditions are detected.