Reticle Pod Stocker

Name: Reticle Pod Stocker
Brand: MFSG

Reticle SMIF Pod (RSP150) Crystal Box

The Reticle Pod Stocker is designed for the automated storage and transfer of reticle pods in semiconductor cleanroom environments. It supports both automatic OHT docking and manual operation, helping maintain reticle integrity and improve overall fab efficiency and yield. The MFSG Reticle Pod Stocker is compatible with both handle-type and non-handle-type reticle pods, providing flexible integration with different fab requirements.

Optional Configurations

Number of manual ports

Number of OHT ports

N₂ or xCDA Purge Function

Wireless Power Supply

ECO mode

Key Features

Cleanliness： Class 100

Vibration： ≤0.5 G

Max payload： ≤12.5 kg

Certifications： CE, SEMI S2, S23, F47 Standards

RFID system： Auto tracking by HF or LF device

Auto Teaching： Fast and convenient

Integrated purge system with purge data monitoring and statistics： N₂ or xCDA

Flexible port configuration： Easy swap between In and Out ports

System integration compatibility： With Various MCS

Smart Storage Controller

The Intelligent Stocker Control System provides automated control and inventory management for stocker equipment. Compliant with the SEMI E88 standard, it receives commands from host systems such as the MCS to manage carrier storage and retrieval operations.

When integrated with a 3D camera, the system supports rapid Auto Teaching, simplifying equipment installation and commissioning. It also supports RFID and SmartTag identification. Combined with MFSG’s proprietary RFID, SmartTag and E84 modules, the system delivers industry-leading identification reliability.

Application

Stocker control and inventory tracking

Key Features

Uses intelligent algorithms to optimize command execution and storage-location management, reducing carrier storage and retrieval time while increasing throughput and storage utilization

Interfaces with multiple mainstream MCS platforms for efficient system integration and deployment

Supports real-time monitoring of multiple gas flow, pressure and humidity channels

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