The Reticle Stocker is used for the storage and transfer of photomask boxes within semiconductor cleanrooms. It supports both automatic and manual interfacing with overhead hoist transport systems, ensuring the quality of photomasks and improving the overall yield of wafer fabrication plants. The MF Reticle Stocker is compatible with both lift and non-lift styles.
Optional configurations include Manual entry/exit ports/Crane ports/Purge function/Auto teaching/RFID/Wireless power supply
Benefits
The benefits of a wafer / reticle stocker include :
User friendly interface
Stable system integration
Spacing design compliant with SEMI standards
Equipped with a purging system and purging statistics functionality
Compatible with multiple MCS (Material Control Systems)
Flexible port quantity configuration
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