Reticle Cabinet is a photomask box storage device equipped with an inflating function, designed for bulk storage of photomask boxes used in integrated circuit production. By filling with pure gas, it ensures the quality of the photomasks. The Reticle Cabinet is able to achieve a reduction in photomask box humidity to below RH10% within a very short time under extremely low flow conditions.
Benefits
The benefits of a Purge Reticle Cabinet include :
User friendly interface
Stable System Integration
Drawer Design with Large-Capacity Storage
High-Speed Continuous Purging
Compatibility with Various EAP Communications
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