The OHB system, in conjunction with the overhead rail system, provides aerial bulk storage (and purification) for wafer boxes, enhancing space utilization in wafer fabs and maximizing the efficiency of wafer carrier transfers between processes.
Optional configuration include:
Storage Slots: 1-slot, 2-slot, 3-slot, 4-slot
Carriers: Supports storage (and purification) for 8-inch PODs and 12-inch FOUPs
Purge Function: Standard features include flow meter, pressure gauge, and position sensor. Optional features include RFID reader, E84 communication, MFC (Mass Flow Controller), temperature and humidity sensors, and recipe management
The benefits of an OHB System include :
OLUS (Operator Load Unload Station) works with OHT via E84 communication for FOUP loading and unloading. It is capable of event communication with upper-level systems such as MCS (Material Control Systems) and EAP (Equipment Automation Protocol).
Optional configuration include Single or dual PORT/Clamp
The benefits of an OLUS include :
The E-Rack enhances control and information tracking by communicating with upper-level systems. It works with intelligent transport equipment to achieve closed-loop management of product delivery.
The benefits of an E-Rack include :
Reticle Cabinet is a photomask box storage device equipped with an inflating function, designed for bulk storage of photomask boxes used in integrated circuit production. By filling with pure gas, it ensures the quality of the photomasks. The Reticle Cabinet is able to achieve a reduction in photomask box humidity to below RH10% within a very short time under extremely low flow conditions.
The benefits of a Purge Reticle Cabinet include :
The NTB (Near Tool Buffer) is used in wafer fabrication plants as a buffer device to interface between overhead hoist transport systems and machine load/unload ports. It reduces machine wait times and improves machine utilization. The NTB is designed in accordance with SEMI E15.1 and can perfectly interface with load ports that meet the E15.1 standard.
Optional configurations include 2/3/4 load port
The benefits of an NTB include :
Mostly is used for the transfer and storage of wafer carriers between production processes in semiconductor cleanrooms. It supports various carriers such as PODs and FOUPs, and also includes purification functions. The Stocker features a traversal speed of up to 2 m/s, matching the top industry standards, and is committed to developing high-performance equipment both domestically and globally.
Optional configurations include: Manual entry/exit ports/Crane ports/Sorting ports/Purge function/Auto teaching/RFID/Wireless power supply
The benefits of a wafer / reticle stocker include :
The Reticle Stocker is used for the storage and transfer of photomask boxes within semiconductor cleanrooms. It supports both automatic and manual interfacing with overhead hoist transport systems, ensuring the quality of photomasks and improving the overall yield of wafer fabrication plants. The MF Reticle Stocker is compatible with both lift and non-lift styles.
Optional configurations include Manual entry/exit ports/Crane ports/Purge function/Auto teaching/RFID/Wireless power supply
The benefits of a wafer / reticle stocker include :
At MFSG, we see ourselves as a key driver in helping our semiconductor fab customers increase operational efficiency and reduce operating costs. Efficiency, flexibility, and reliability are core elements of our team culture.