The OHB system, located below the track and utilized for mass storage of FOUPs/Pods, can speed up transfer times when combined with the OHT system. To ensure the microenvironment in the FOUP/POD and increase product yield for important processes, it is feasible to install an OHB with a purging unit.
The benefits of an OHB System include :
Transit station between manual loading and OHT auto transfer
The benefits of an OLUS include :
The E-Rack is an innovative, state-of-the-art material handling system that enables fast, efficient, and secure storage and retrieval of raw material, semi-finished products, parts, and finished goods. This Integrated RFID technology also facilitates accurate record keeping and traceability of materials through the entire production cycle.
The benefits of an E-Rack include :
Purge Reticle Cabinet is a piece of small-footprint equipment that can be installed nearby LT tools. To preserve the quality of the reticle, it is utilized to hold high turnover reticle pods that have been purge-filled with XCDA gas. Within a short period of time, humidity may be effectively managed to be below RH 10%.
The benefits of a Purge Reticle Cabinet include :
In order to use equipment with short process times (high input and output), NTB aims to raise utilization rates to about 100%. To match the machine's process production speed, shorten waiting times, and increase machine utilization, many layers of buffer zones are put above the machine's top and lower feeding ports. By using E84 and the semiconductor standard communication protocol (SECS), MFSG achieves data exchange with various HOST
The benefits of an NTB include :
Mostly utilized for the short-term storage of wafer boxes in between clean room processes and semiconductor fabrication processes. MeetFuture offers flexible design and modification of several types of STK (T, R, tower) in accordance with the Cleanroom's available area in order to maximize space usage and cross-floor transfers. Additionally, our storage system has a purge feature for the crucial semiconductor manufacturing process.
The controller may scan the POD's RFID and upload the data to the host server so that the production line employees can use the PC to precisely and rapidly locate the location of the required mask box at the system end. By filling with inert gas, critical processes may guarantee the mask's quality and increase the wafer factory's total product output.
The benefits of a wafer / reticle stocker include :
At MFSG, we see ourselves as a key driver in helping our semiconductor fab customers increase operational efficiency and reduce operating costs. Efficiency, flexibility, and reliability are core elements of our team culture.