In conjunction with the overhead rail system, the solution provides aerial bulk storage positions for FOUP/pod/reticle pod, enhancing space utilization in wafer fabrication plants and maximizing the efficiency of wafer carrier transfers between processes.
Through a well-planned purge pipeline layout and the addition of purification units, the system introduces pure gas into the storage environment, ensuring a controlled microenvironment within the photomask boxes and improving product yield.
Optional Configuration including 1/2/3/4 storage port
Benefits
The benefits of an OPS include :
Flexible arrangement of racks
Unified control for the entire bay
Independent control of specific shelves
Power-Out Purge Continuity
Air is blown only when cargo is present
Purging function during idle periods
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