The OHB system, in conjunction with the overhead rail system, provides aerial bulk storage (and purification) for wafer boxes, enhancing space utilization in wafer fabs and maximizing the efficiency of wafer carrier transfers between processes.
Optional configuration include:
Storage Slots: 1-slot, 2-slot, 3-slot, 4-slot
Carriers: Supports storage (and purification) for 8-inch PODs and 12-inch FOUPs
Purge Function: Standard features include flow meter, pressure gauge, and position sensor. Optional features include RFID reader, E84 communication, MFC (Mass Flow Controller), temperature and humidity sensors, and recipe management
The benefits of an OHB System include :
MFSG is for those who aspire to go beyond industry transformation and strive for innovation and collaboration.