OLUS (Operator Load Unload Station) works with OHT via E84 communication for FOUP loading and unloading. It is capable of event communication with upper-level systems such as MCS (Material Control Systems) and EAP (Equipment Automation Protocol).
Optional configuration include Single or dual PORT/Clamp
Benefits
The benefits of an OLUS include :
User friendly interface
Stable system integration
Auto/manual Load/Unload switching
Certified with SEMI S2
Compatible with various EAP (Equipment Automation Protocol) communications
Equipped with a clamp
Start Your Journey With Us
MFSG is for those who aspire to go beyond industry transformation and strive for innovation and collaboration.