The NTB (Near Tool Buffer) is used in wafer fabrication plants as a buffer device to interface between overhead hoist transport systems and machine load/unload ports. It reduces machine wait times and improves machine utilization. The NTB is designed in accordance with SEMI E15.1 and can perfectly interface with load ports that meet the E15.1 standard.
Optional configurations include 2/3/4 load port
Benefits
The benefits of an NTB include :
User friendly interface
Stable system integration
Customizable buffer quantity
Fast movement functionality
Certified with SEMI S2/F47 standards
Compatible with EAP/MCS communication
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