Mostly is used for the transfer and storage of wafer carriers between production processes in semiconductor cleanrooms. It supports various carriers such as PODs and FOUPs, and also includes purification functions. The Stocker features a traversal speed of up to 2 m/s, matching the top industry standards, and is committed to developing high-performance equipment both domestically and globally.
Optional configurations include: Manual entry/exit ports/Crane ports/Sorting ports/Purge function/Auto teaching/RFID/Wireless power supply
Benefits
The benefits of a wafer / reticle stocker include :
User friendly interface
Stable system integration
Spacing design compliant with SEMI standards
Equipped with a purging system
Certified with SEMI CE/S2/S23/F47 standards
Compatible with multiple MCS (Material Control Systems)
Flexible port quantity configuration
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