Through the control of intelligent scheduling software, OHT (Overhead Hoist Transport) systems replace cleanroom personnel in transporting wafer carriers. This improves production efficiency and quality, achieves smart manufacturing, and reduces production costs.
Compatible for FOUP / SMIF POD / Reticle POD
Benefits
The benefits of an OHB System include :
Compact Structure Design
Increased travel speed
Faster loading and unloading speed
Stable Wafer Box Transport
Refined track merging and diverging control
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