Solutions
Tool Loadport Purge (TLP)
Benefits

The benefits of a TLP System include :

Prevent AMC from condensing on the wafer
Reduce TOX levels inside the FOUP
Reduce particle count on the wafer surface
Higher yield / Small wafer to wafer variation / High tool throughput / Extended Queue time
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MFSG is for those who aspire to go beyond industry transformation and strive for innovation and collaboration.