Purge Reticle Cabinet is a piece of small-footprint equipment that can be installed nearby LT tools. To preserve the quality of the reticle, it is utilized to hold high turnover reticle pods that have been purge-filled with XCDA gas. Within a short period of time, humidity may be effectively managed to be below RH 10%.
The benefits of a Purge Reticle Cabinet include :
Storage and Retrieval of Reticle Pods in an orderly manner
Purge function allows for controlled humidity
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